Silicon-based micro thermoelectric generator fabricated by CMOS compatible process

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Energy harvester is a key device for realizing trillion sensors network society. Thermoelectric generator (TEG) is regarded as the ultimate energy harvester to provide semipermanent power from heat energies via Seebeck effect. The recent discovery of the superior thermoelectric (TE) property of silicon nanowires (Si-NWs) opens the way for Si-based TEGs. In this paper, a very simple device architecture of Si-based micro TEG is proposed. It can be fabricated by the CMOS-compatible process, and the TE power density is found to be scalable by miniaturizing and integrating the structure.

Original languageEnglish
Title of host publicationIMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages22-23
Number of pages2
ISBN (Electronic)9781509039913
DOIs
Publication statusPublished - 2017 Jul 31
Event15th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2017 - Kyoto, Japan
Duration: 2017 Jun 292017 Jun 30

Publication series

NameIMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai

Other

Other15th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2017
Country/TerritoryJapan
CityKyoto
Period17/6/2917/6/30

Keywords

  • Si nanowaire
  • energy harvester
  • themoelectrics

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films

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