Silicon-based micro thermoelectric generator fabricated by CMOS compatible process

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    Energy harvester is a key device for realizing trillion sensors network society. Thermoelectric generator (TEG) is regarded as the ultimate energy harvester to provide semipermanent power from heat energies via Seebeck effect. The recent discovery of the superior thermoelectric (TE) property of silicon nanowires (Si-NWs) opens the way for Si-based TEGs. In this paper, a very simple device architecture of Si-based micro TEG is proposed. It can be fabricated by the CMOS-compatible process, and the TE power density is found to be scalable by miniaturizing and integrating the structure.

    Original languageEnglish
    Title of host publicationIMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages22-23
    Number of pages2
    ISBN (Electronic)9781509039913
    DOIs
    Publication statusPublished - 2017 Jul 31
    Event15th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2017 - Kyoto, Japan
    Duration: 2017 Jun 292017 Jun 30

    Other

    Other15th International Meeting for Future of Electron Devices, Kansai, IMFEDK 2017
    CountryJapan
    CityKyoto
    Period17/6/2917/6/30

    Keywords

    • energy harvester
    • Si nanowaire
    • themoelectrics

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials
    • Surfaces, Coatings and Films

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  • Cite this

    Watanabe, T. (2017). Silicon-based micro thermoelectric generator fabricated by CMOS compatible process. In IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai (pp. 22-23). [7998023] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMFEDK.2017.7998023