Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity

Jun Mizuno, Kay Nottmeyer, Takashi Kobayashi, Kazuyuki Minami, Masayoshi Esashi

Research output: Contribution to conferencePaper

8 Citations (Scopus)

Abstract

A silicon bulk micromachined accelerometer structure has been fabricated and characterized, that combines linear and angular sensitivity in a single device. Unlike micromachined gyro-scopes no vibratory motion is involved for the detection of rotation, but the direct effect of linear and angular acceleration is detected by simultaneous monitoring of the displacement and tilt of the seismic mass. One axis of linear and up to two axes of angular acceleration can be measured. This combination has practical relevance for single-point sensing of the complete motion of e.g. a car body with a minimum number of sensors in applications like vehicle dynamic control or crash detection.

Original languageEnglish
Pages1197-1200
Number of pages4
Publication statusPublished - 1997 Jan 1
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
Duration: 1997 Jun 161997 Jun 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
CityChicago, IL, USA
Period97/6/1697/6/19

ASJC Scopus subject areas

  • Engineering(all)

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    Mizuno, J., Nottmeyer, K., Kobayashi, T., Minami, K., & Esashi, M. (1997). Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity. 1197-1200. Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), Chicago, IL, USA, .