Silicon micro/nanofabrication using metastable helium atom beam lithography

Engineering & Materials Science

• Atoms 63%
• Etching 13%
• Helium 68%
• Lithography 66%
• Nanotechnology 70%
• Self assembled monolayers 37%
• Silicon 47%
• Substrates 25%
• Wet etching 16%

Physics & Astronomy

• dosage 8%
• etching 18%
• helium 9%
• helium atoms 69%
• lithography 50%
• metastable atoms 79%
• nanofabrication 72%
• silicon 32%

Chemical Compounds

• Etching 54%
• Helium Atom 100%
• Self Assembled Monolayer 58%
• Surface 9%