Silicon-platformed nonlinear waveguide in lithium niobate membrane

Takuya Utsugida, Sunao Kurimura, Yusuke Muranaka, Eiki Mochizuki, Hirochika Nakajima

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    A novel waveguide structure in Mg:LN membrane was developed on Si platform by wet and dry etching processes. Periodically poled structure in the membrane achieved QPM SHG at telecommunication band.

    Original languageEnglish
    Title of host publicationCLEO: Science and Innovations, CLEO_SI 2013
    Publication statusPublished - 2013
    EventCLEO: Science and Innovations, CLEO_SI 2013 - San Jose, CA
    Duration: 2013 Jun 92013 Jun 14

    Other

    OtherCLEO: Science and Innovations, CLEO_SI 2013
    CitySan Jose, CA
    Period13/6/913/6/14

    Fingerprint

    Silicon
    lithium niobates
    Waveguides
    Lithium
    membranes
    waveguides
    Membranes
    Dry etching
    Wet etching
    silicon
    Telecommunication
    telecommunication
    platforms
    etching
    lithium niobate

    ASJC Scopus subject areas

    • Computer Networks and Communications
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics

    Cite this

    Utsugida, T., Kurimura, S., Muranaka, Y., Mochizuki, E., & Nakajima, H. (2013). Silicon-platformed nonlinear waveguide in lithium niobate membrane. In CLEO: Science and Innovations, CLEO_SI 2013

    Silicon-platformed nonlinear waveguide in lithium niobate membrane. / Utsugida, Takuya; Kurimura, Sunao; Muranaka, Yusuke; Mochizuki, Eiki; Nakajima, Hirochika.

    CLEO: Science and Innovations, CLEO_SI 2013. 2013.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Utsugida, T, Kurimura, S, Muranaka, Y, Mochizuki, E & Nakajima, H 2013, Silicon-platformed nonlinear waveguide in lithium niobate membrane. in CLEO: Science and Innovations, CLEO_SI 2013. CLEO: Science and Innovations, CLEO_SI 2013, San Jose, CA, 13/6/9.
    Utsugida T, Kurimura S, Muranaka Y, Mochizuki E, Nakajima H. Silicon-platformed nonlinear waveguide in lithium niobate membrane. In CLEO: Science and Innovations, CLEO_SI 2013. 2013
    Utsugida, Takuya ; Kurimura, Sunao ; Muranaka, Yusuke ; Mochizuki, Eiki ; Nakajima, Hirochika. / Silicon-platformed nonlinear waveguide in lithium niobate membrane. CLEO: Science and Innovations, CLEO_SI 2013. 2013.
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