Silicon-platformed nonlinear waveguide in lithium niobate membrane

Takuya Utsugida, Sunao Kurimura, Yusuke Muranaka, Eiki Mochizuki, Hirochika Nakajima

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    A novel waveguide structure in Mg:LN membrane was developed on Si platform by wet and dry etching processes. Periodically poled structure in the membrane achieved QPM SHG at telecommunication band.

    Original languageEnglish
    Title of host publication2013 Conference on Lasers and Electro-Optics, CLEO 2013
    PublisherIEEE Computer Society
    ISBN (Print)9781557529725
    Publication statusPublished - 2013
    Event2013 Conference on Lasers and Electro-Optics, CLEO 2013 - San Jose, CA
    Duration: 2013 Jun 92013 Jun 14

    Other

    Other2013 Conference on Lasers and Electro-Optics, CLEO 2013
    CitySan Jose, CA
    Period13/6/913/6/14

    Fingerprint

    Silicon
    Waveguides
    Lithium
    Membranes
    Dry etching
    Wet etching
    Telecommunication
    lithium niobate

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials

    Cite this

    Utsugida, T., Kurimura, S., Muranaka, Y., Mochizuki, E., & Nakajima, H. (2013). Silicon-platformed nonlinear waveguide in lithium niobate membrane. In 2013 Conference on Lasers and Electro-Optics, CLEO 2013 [6833698] IEEE Computer Society.

    Silicon-platformed nonlinear waveguide in lithium niobate membrane. / Utsugida, Takuya; Kurimura, Sunao; Muranaka, Yusuke; Mochizuki, Eiki; Nakajima, Hirochika.

    2013 Conference on Lasers and Electro-Optics, CLEO 2013. IEEE Computer Society, 2013. 6833698.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Utsugida, T, Kurimura, S, Muranaka, Y, Mochizuki, E & Nakajima, H 2013, Silicon-platformed nonlinear waveguide in lithium niobate membrane. in 2013 Conference on Lasers and Electro-Optics, CLEO 2013., 6833698, IEEE Computer Society, 2013 Conference on Lasers and Electro-Optics, CLEO 2013, San Jose, CA, 13/6/9.
    Utsugida T, Kurimura S, Muranaka Y, Mochizuki E, Nakajima H. Silicon-platformed nonlinear waveguide in lithium niobate membrane. In 2013 Conference on Lasers and Electro-Optics, CLEO 2013. IEEE Computer Society. 2013. 6833698
    Utsugida, Takuya ; Kurimura, Sunao ; Muranaka, Yusuke ; Mochizuki, Eiki ; Nakajima, Hirochika. / Silicon-platformed nonlinear waveguide in lithium niobate membrane. 2013 Conference on Lasers and Electro-Optics, CLEO 2013. IEEE Computer Society, 2013.
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