Similarities in photoluminescence in hafnia and zirconia induced by ultraviolet photons

Toshihide Ito, Motohiro Maeda, Kazuhiko Nakamura, Hiromitsu Kato, Yoshimichi Ohki

    Research output: Contribution to journalArticle

    68 Citations (Scopus)

    Abstract

    Photoluminescence (PL) spectra induced by ultraviolet photons were measured for amorphous hafnia and zirconia deposited by plasma-enhanced chemical-vapor deposition (PECVD), amorphous hafnia deposited by pulse laser deposition, and crystalline yttria-stabilized zirconia. Two kinds of samples were prepared for both hafnia and zirconia deposited by PECVD using different source alkoxides in different deposition chambers. A PL peak was observed around 2.8 eV similarly in all hafnia and zirconia samples, irrespective of the difference in crystallinity, oxygen deficiency, source alkoxide, deposition method, or the substrate material. The decay profile of this PL is also similar in all the samples. These facts clearly show that neither impurities, oxygen vacancy, nor defects at the interface between the sample and the substrate are responsible for the PL. It is a luminescence inherent in hafnia and zirconia and is most likely due to radiative recombination between localized states at the band tails. When the samples were annealed in oxygen, a new PL peak appeared around 4.2 eV in all the amorphous samples. Its decay profile is also in common with these samples. Vacuum-ultraviolet absorption measurements and PL excitation measurements indicate that the 4.2-eV PL is excited due to the interband absorption.

    Original languageEnglish
    Article number054104
    JournalJournal of Applied Physics
    Volume97
    Issue number5
    DOIs
    Publication statusPublished - 2005

    Fingerprint

    zirconium oxides
    photoluminescence
    photons
    alkoxides
    vapor deposition
    laser deposition
    ultraviolet absorption
    hypoxia
    decay
    oxygen
    radiative recombination
    profiles
    yttria-stabilized zirconia
    crystallinity
    chambers
    luminescence
    impurities
    vacuum
    defects
    pulses

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)
    • Physics and Astronomy(all)

    Cite this

    Similarities in photoluminescence in hafnia and zirconia induced by ultraviolet photons. / Ito, Toshihide; Maeda, Motohiro; Nakamura, Kazuhiko; Kato, Hiromitsu; Ohki, Yoshimichi.

    In: Journal of Applied Physics, Vol. 97, No. 5, 054104, 2005.

    Research output: Contribution to journalArticle

    Ito, Toshihide ; Maeda, Motohiro ; Nakamura, Kazuhiko ; Kato, Hiromitsu ; Ohki, Yoshimichi. / Similarities in photoluminescence in hafnia and zirconia induced by ultraviolet photons. In: Journal of Applied Physics. 2005 ; Vol. 97, No. 5.
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