Abstract
The intensity of the measured spectrum, especially the Auger spectrum, is strongly affected by the contribution of backscattered electrons with high energy, since those energetic electrons can also excite Auger electrons at the surface. The aim of the present paper is to describe briefly how the energy distribution of backscattered electrons can be estimated and how the result can be applied for the quantitative analysis by electron spectroscopies, especially by AES.
| Original language | English |
|---|---|
| Journal | Surface and Interface Analysis |
| Volume | 12 |
| Issue number | 1-12 |
| Publication status | Published - 1988 Jul 1 |
| Externally published | Yes |
| Event | Proceedings of the European Conference on Applications of Surface and Interface Analysis, ECASIA 87 - Fellbach, West Ger Duration: 1987 Oct 19 → 1987 Oct 23 |
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry