Simulation of electron/solid interaction and application to quantitative analysis by electron spectroscopies

S. Ichimura, Ze Jung Ding, R. Shimizu

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)

Abstract

The intensity of the measured spectrum, especially the Auger spectrum, is strongly affected by the contribution of backscattered electrons with high energy, since those energetic electrons can also excite Auger electrons at the surface. The aim of the present paper is to describe briefly how the energy distribution of backscattered electrons can be estimated and how the result can be applied for the quantitative analysis by electron spectroscopies, especially by AES.

Original languageEnglish
JournalSurface and Interface Analysis
Volume12
Issue number1-12
Publication statusPublished - 1988 Jul 1
Externally publishedYes
EventProceedings of the European Conference on Applications of Surface and Interface Analysis, ECASIA 87 - Fellbach, West Ger
Duration: 1987 Oct 191987 Oct 23

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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