Smallest dead volume microvalves for integrated chemical analyzing systems

Shuichi Shoji, Bart Van der Schoot, Nico de Rooij, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

33 Citations (Scopus)

Abstract

Normally open, normally closed, and three-way microvalves were developed. These microvalves had a simple structure and small dead volume on the order of tens of nl. Each microvalve was driven by a stack-type piezo-actuator and the controllable flow range is from 1 μl/min to tens of μl/min. These valves are useful for constructing integrated chemical analyzing systems.

Original languageEnglish
Title of host publicationTransducers '91
Place of PublicationPiscataway, NJ, United States
PublisherPubl by IEEE
Pages1052-1055
Number of pages4
ISBN (Print)0879425857
Publication statusPublished - 1991
Externally publishedYes
Event1991 International Conference on Solid-State Sensors and Actuators - San Francisco, CA, USA
Duration: 1991 Jun 241991 Jun 28

Other

Other1991 International Conference on Solid-State Sensors and Actuators
CitySan Francisco, CA, USA
Period91/6/2491/6/28

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Shoji, S., Van der Schoot, B., de Rooij, N., & Esashi, M. (1991). Smallest dead volume microvalves for integrated chemical analyzing systems. In Transducers '91 (pp. 1052-1055). Publ by IEEE.