Sn electrodeposition process for fabricating microabsorber arrays for an X-ray microcalorimeter

Takayuki Homma, Hirotaka Sato, Hideomi Kobayashi, Takahiro Arakawa, Hiroyuki Kudo, Tetsuya Osaka, Shuichi Shoji, Yoshitaka Ishisaki, Tai Oshima, Naoko Iyomoto, Ryuichi Fujimoto, Kazuhisa Mitsuda

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Sn electrodeposition was employed for fabricating an array of microabsorbers with a 'mushroom-shaped' microstructure for a precision X-ray microdetector, the so called X-ray microcalorimeter. A deposition process for flat and smooth Sn films, which was suitable for the use of the absorber material, was developed by optimizing the conditions of additives such as o-cresol-4-sulfonic acid and polyethyleneglycol (PEG) to the Sn bath. The Sn films exhibited suitable properties, i.e. a higher superconducting transition temperature than the operating temperature of the X-ray microcalorimeter. The mushroom-shaped absorber array was successfully fabricated by Sn electrodeposition in combination with a photolithographic technique.

Original languageEnglish
Pages (from-to)143-148
Number of pages6
JournalJournal of Electroanalytical Chemistry
Volume559
DOIs
Publication statusPublished - 2003 Nov 15

Fingerprint

Electrodeposition
X rays
Sulfonic Acids
Superconducting transition temperature
Microstructure
Acids
Temperature

Keywords

  • Electrodeposition
  • Microfabrication
  • Pattern formation
  • Surfactant
  • Three-dimensional microstructure
  • X-ray microcalorimeter

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Analytical Chemistry
  • Electrochemistry

Cite this

Sn electrodeposition process for fabricating microabsorber arrays for an X-ray microcalorimeter. / Homma, Takayuki; Sato, Hirotaka; Kobayashi, Hideomi; Arakawa, Takahiro; Kudo, Hiroyuki; Osaka, Tetsuya; Shoji, Shuichi; Ishisaki, Yoshitaka; Oshima, Tai; Iyomoto, Naoko; Fujimoto, Ryuichi; Mitsuda, Kazuhisa.

In: Journal of Electroanalytical Chemistry, Vol. 559, 15.11.2003, p. 143-148.

Research output: Contribution to journalArticle

Homma, T, Sato, H, Kobayashi, H, Arakawa, T, Kudo, H, Osaka, T, Shoji, S, Ishisaki, Y, Oshima, T, Iyomoto, N, Fujimoto, R & Mitsuda, K 2003, 'Sn electrodeposition process for fabricating microabsorber arrays for an X-ray microcalorimeter', Journal of Electroanalytical Chemistry, vol. 559, pp. 143-148. https://doi.org/10.1016/S0022-0728(02)01282-2
Homma, Takayuki ; Sato, Hirotaka ; Kobayashi, Hideomi ; Arakawa, Takahiro ; Kudo, Hiroyuki ; Osaka, Tetsuya ; Shoji, Shuichi ; Ishisaki, Yoshitaka ; Oshima, Tai ; Iyomoto, Naoko ; Fujimoto, Ryuichi ; Mitsuda, Kazuhisa. / Sn electrodeposition process for fabricating microabsorber arrays for an X-ray microcalorimeter. In: Journal of Electroanalytical Chemistry. 2003 ; Vol. 559. pp. 143-148.
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