TY - JOUR
T1 - Sn electrodeposition process for fabricating microabsorber arrays for an X-ray microcalorimeter
AU - Homma, Takayuki
AU - Sato, Hirotaka
AU - Kobayashi, Hideomi
AU - Arakawa, Takahiro
AU - Kudo, Hiroyuki
AU - Osaka, Testuya
AU - Shoji, Shuichi
AU - Ishisaki, Yoshitaka
AU - Oshima, Tai
AU - Iyomoto, Naoko
AU - Fujimoto, Ryuichi
AU - Mitsuda, Kazuhisa
N1 - Funding Information:
This work was supported financially in part by the Industrial Technology Research Grant Program in 00 from the New Energy and Industrial Technology Development Organization (NEDO) of Japan, and also by a Grant-in-Aid for Encouragement of Young Scientists from the Ministry of Education, Science, Sports and Culture. The authors are grateful to Musashino Denshi Corporation for technical support in the polishing process and Hitachi Science Systems, Ltd., Techno Research Laboratory for the SEM observations.
PY - 2003/11/15
Y1 - 2003/11/15
N2 - Sn electrodeposition was employed for fabricating an array of microabsorbers with a 'mushroom-shaped' microstructure for a precision X-ray microdetector, the so called X-ray microcalorimeter. A deposition process for flat and smooth Sn films, which was suitable for the use of the absorber material, was developed by optimizing the conditions of additives such as o-cresol-4-sulfonic acid and polyethyleneglycol (PEG) to the Sn bath. The Sn films exhibited suitable properties, i.e. a higher superconducting transition temperature than the operating temperature of the X-ray microcalorimeter. The mushroom-shaped absorber array was successfully fabricated by Sn electrodeposition in combination with a photolithographic technique.
AB - Sn electrodeposition was employed for fabricating an array of microabsorbers with a 'mushroom-shaped' microstructure for a precision X-ray microdetector, the so called X-ray microcalorimeter. A deposition process for flat and smooth Sn films, which was suitable for the use of the absorber material, was developed by optimizing the conditions of additives such as o-cresol-4-sulfonic acid and polyethyleneglycol (PEG) to the Sn bath. The Sn films exhibited suitable properties, i.e. a higher superconducting transition temperature than the operating temperature of the X-ray microcalorimeter. The mushroom-shaped absorber array was successfully fabricated by Sn electrodeposition in combination with a photolithographic technique.
KW - Electrodeposition
KW - Microfabrication
KW - Pattern formation
KW - Surfactant
KW - Three-dimensional microstructure
KW - X-ray microcalorimeter
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U2 - 10.1016/S0022-0728(02)01282-2
DO - 10.1016/S0022-0728(02)01282-2
M3 - Conference article
AN - SCOPUS:0242405856
SN - 0022-0728
VL - 559
SP - 143
EP - 148
JO - Journal of Electroanalytical Chemistry
JF - Journal of Electroanalytical Chemistry
T2 - International Symposium on Materials Processing for Nonstruct (MPND2001)
Y2 - 16 September 2001 through 19 September 2001
ER -