Soft x-ray laser beamline for surface processing and damage studies

Masahiko Ishino, Thanh Hung Dinh, Yuji Hosaka, Noboru Hasegawa, Kimio Yoshimura, Hiroki Yamamoto, Tadashi Hatano, Takeshi Higashiguchi, Kazuyuki Sakaue, Satoshi Ichimaru, Masatoshi Hatayama, Akira Sasaki, Masakazu Washio, Masaharu Nishikino, Yasunari Maekawa

Research output: Contribution to journalArticlepeer-review

Abstract

We have developed a soft x-ray laser (SXRL) beamline equipped with an intensity monitor dedicated to ablation study such as surface processing and damage formation. The SXRL beam having a wavelength of 13.9 nm, pulse width of 7 ps, and pulse energy of around 200 nJ is generated from Ag plasma mediums using an oscillator-amplifier configuration. The SXRL beam is focused onto the sample surface by the Mo/Si multilayer coated spherical mirror. To get the correct irradiation energy/fluence, an intensity monitor composed of a Mo/Si multilayer beam splitter and an x-ray charge-coupled device camera has been installed in the beamline. The Mo/Si multilayer beam splitter has a large polarization dependence in the reflectivity around the incident angle of 45. However, by evaluating the relationship between reflectivity and transmittance of the beam splitter appropriately, the irradiation energy onto the sample surface can be derived from the energy acquired by the intensity monitor. This SXRL beamline is available to not only the ablation phenomena but also the performance evaluation of soft x-ray optics and resists.

Original languageEnglish
Pages (from-to)3692-3698
Number of pages7
JournalApplied Optics
Volume59
Issue number12
DOIs
Publication statusPublished - 2020 Apr 20

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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