Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block

Minoru Osada, Kosho Akatsuka, Yasuo Ebina, Hiroshi Funakubo, Takanori Kiguchi, Kazunori Takada, Takayoshi Sasaki

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We have demonstrated a novel procedure for fabricating high-κ dielectric nanofilms by using a titania nanosheet as a building block. The layer-by-layer assembly of titania nanosheets using an atomically flat SrRuO3 substrate is advantageous as a means of fabricating atomically uniform multilayer high-κ nanofilms. High-resolution transmission electron microscopy revealed that these multilayer nanofilms are composed of a well-ordered lamellar structure without an interfacial dead layer. These nanofilms exhibited both high dielectric constant (εr ∼ 125) and low leakage current density (J < 10-7A/cm2) even for thicknesses as low as 10nm. These results indicate that the titania nanosheet is a very promising candidate as a high-κ nanoblock, and its bottom-up fabrication provides new opportunities for the development of high-κ devices.

Original languageEnglish
Pages (from-to)6979-6983
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number10 B
DOIs
Publication statusPublished - 2007 Oct 22
Externally publishedYes

Fingerprint

Nanosheets
titanium
Titanium
Fabrication
fabrication
Multilayers
Lamellar structures
High resolution transmission electron microscopy
Leakage currents
leakage
Permittivity
Current density
assembly
permittivity
current density
transmission electron microscopy
high resolution
Substrates

Keywords

  • High-κ dielectrics
  • Layer-by-layer assembly
  • Titania nanosheet

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block. / Osada, Minoru; Akatsuka, Kosho; Ebina, Yasuo; Funakubo, Hiroshi; Kiguchi, Takanori; Takada, Kazunori; Sasaki, Takayoshi.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 46, No. 10 B, 22.10.2007, p. 6979-6983.

Research output: Contribution to journalArticle

Osada, Minoru ; Akatsuka, Kosho ; Ebina, Yasuo ; Funakubo, Hiroshi ; Kiguchi, Takanori ; Takada, Kazunori ; Sasaki, Takayoshi. / Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2007 ; Vol. 46, No. 10 B. pp. 6979-6983.
@article{f385ebda032d486f93fedb21cf558c9a,
title = "Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block",
abstract = "We have demonstrated a novel procedure for fabricating high-κ dielectric nanofilms by using a titania nanosheet as a building block. The layer-by-layer assembly of titania nanosheets using an atomically flat SrRuO3 substrate is advantageous as a means of fabricating atomically uniform multilayer high-κ nanofilms. High-resolution transmission electron microscopy revealed that these multilayer nanofilms are composed of a well-ordered lamellar structure without an interfacial dead layer. These nanofilms exhibited both high dielectric constant (εr ∼ 125) and low leakage current density (J < 10-7A/cm2) even for thicknesses as low as 10nm. These results indicate that the titania nanosheet is a very promising candidate as a high-κ nanoblock, and its bottom-up fabrication provides new opportunities for the development of high-κ devices.",
keywords = "High-κ dielectrics, Layer-by-layer assembly, Titania nanosheet",
author = "Minoru Osada and Kosho Akatsuka and Yasuo Ebina and Hiroshi Funakubo and Takanori Kiguchi and Kazunori Takada and Takayoshi Sasaki",
year = "2007",
month = "10",
day = "22",
doi = "10.1143/JJAP.46.6979",
language = "English",
volume = "46",
pages = "6979--6983",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "10 B",

}

TY - JOUR

T1 - Solution-based fabrication of high-κ dielectric nanofilms using titania nanosheets as a building block

AU - Osada, Minoru

AU - Akatsuka, Kosho

AU - Ebina, Yasuo

AU - Funakubo, Hiroshi

AU - Kiguchi, Takanori

AU - Takada, Kazunori

AU - Sasaki, Takayoshi

PY - 2007/10/22

Y1 - 2007/10/22

N2 - We have demonstrated a novel procedure for fabricating high-κ dielectric nanofilms by using a titania nanosheet as a building block. The layer-by-layer assembly of titania nanosheets using an atomically flat SrRuO3 substrate is advantageous as a means of fabricating atomically uniform multilayer high-κ nanofilms. High-resolution transmission electron microscopy revealed that these multilayer nanofilms are composed of a well-ordered lamellar structure without an interfacial dead layer. These nanofilms exhibited both high dielectric constant (εr ∼ 125) and low leakage current density (J < 10-7A/cm2) even for thicknesses as low as 10nm. These results indicate that the titania nanosheet is a very promising candidate as a high-κ nanoblock, and its bottom-up fabrication provides new opportunities for the development of high-κ devices.

AB - We have demonstrated a novel procedure for fabricating high-κ dielectric nanofilms by using a titania nanosheet as a building block. The layer-by-layer assembly of titania nanosheets using an atomically flat SrRuO3 substrate is advantageous as a means of fabricating atomically uniform multilayer high-κ nanofilms. High-resolution transmission electron microscopy revealed that these multilayer nanofilms are composed of a well-ordered lamellar structure without an interfacial dead layer. These nanofilms exhibited both high dielectric constant (εr ∼ 125) and low leakage current density (J < 10-7A/cm2) even for thicknesses as low as 10nm. These results indicate that the titania nanosheet is a very promising candidate as a high-κ nanoblock, and its bottom-up fabrication provides new opportunities for the development of high-κ devices.

KW - High-κ dielectrics

KW - Layer-by-layer assembly

KW - Titania nanosheet

UR - http://www.scopus.com/inward/record.url?scp=35348990866&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=35348990866&partnerID=8YFLogxK

U2 - 10.1143/JJAP.46.6979

DO - 10.1143/JJAP.46.6979

M3 - Article

VL - 46

SP - 6979

EP - 6983

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 10 B

ER -