@inproceedings{a044366a2c5c43d29bb5edad06b83027,
title = "Solution growth of SiC crystal with high growth rate using accelerated crucible rotation technique",
abstract = "We performed solution growth of SiC single crystals from Si-Ti-C ternary solution using the accelerated crucible rotation technique (ACRT). It was confirmed that the growth rate exceeding 200 μm/hr was achievable by several ACRT conditions. This high growth rate might be due to the enhancement of the carbon transport from the graphite crucible to the growth interface using the ACRT. Moreover, the incorporation of inclusions of the Si-Ti solvent in the grown crystal was significantly suppressed by using the ACRT. It was thought that the intensive convection near the growth interface resulted in not only the marked increase of SiC growth rate but also the superior homogeneity in the surface morphology. It was concluded that faster stable growth can be accomplished in the SiC solution growth using the ACRT.",
keywords = "6H-SiC, Accelerated crucible rotation technique, Numerical analysis, Solution growth",
author = "K. Kusunoki and K. Kamei and N. Okada and N. Yashiro and A. Yauchi and T. Ujihara and K. Nakajima",
year = "2006",
language = "English",
isbn = "9780878494255",
volume = "527-529",
series = "Materials Science Forum",
number = "PART 1",
pages = "119--122",
booktitle = "Materials Science Forum",
edition = "PART 1",
note = "International Conference on Silicon Carbide and Related Materials 2005, (ICSCRM 2005) ; Conference date: 18-09-2005 Through 23-09-2005",
}