Standard Gibbs energies of formation of SiCl2(g) and SiCl3(g) species at 1000 to 1300 K

Masaki Kanamori, Masahito Sugiura, Akio Fuwa

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    Abstract

    The equilibria in the Si(s)-Cl2(g) system have been studied at temperature from 1000 to 1300 K using a transpiration reactor. The equilibria are considered among Si(s)-Cl2(g)-SiCl2(g)-SiCl3(g)-SiCl4(g). The standard Gibbs energies of formation for the species of SiCl2(g) and SiCl3(g) species at these temperatures are determined simultaneously, where these subchloride species coexist in appreciable quantities with SiCl4 in the gas phase at these temperatures, as follows: SiCl2(g): ΔG°f·SiCl(2)·T(1000-1300 K)=-185.0-2.32×10-2 T kJ·mol-1 SiCl3(g): ΔG°f·SiCl(3)·T(1000-1300 K)=-401.1+3.28×10-2 T kJ·mol-1

    Original languageEnglish
    Pages (from-to)156-163
    Number of pages8
    JournalNippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
    Volume59
    Issue number2
    Publication statusPublished - 1995 Feb

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    energy of formation
    Gibbs free energy
    transpiration
    Transpiration
    Temperature
    temperature
    Gases
    reactors
    vapor phases

    ASJC Scopus subject areas

    • Metals and Alloys

    Cite this

    Standard Gibbs energies of formation of SiCl2(g) and SiCl3(g) species at 1000 to 1300 K. / Kanamori, Masaki; Sugiura, Masahito; Fuwa, Akio.

    In: Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals, Vol. 59, No. 2, 02.1995, p. 156-163.

    Research output: Contribution to journalArticle

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    abstract = "The equilibria in the Si(s)-Cl2(g) system have been studied at temperature from 1000 to 1300 K using a transpiration reactor. The equilibria are considered among Si(s)-Cl2(g)-SiCl2(g)-SiCl3(g)-SiCl4(g). The standard Gibbs energies of formation for the species of SiCl2(g) and SiCl3(g) species at these temperatures are determined simultaneously, where these subchloride species coexist in appreciable quantities with SiCl4 in the gas phase at these temperatures, as follows: SiCl2(g): ΔG°f·SiCl(2)·T(1000-1300 K)=-185.0-2.32×10-2 T kJ·mol-1 SiCl3(g): ΔG°f·SiCl(3)·T(1000-1300 K)=-401.1+3.28×10-2 T kJ·mol-1",
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    AU - Kanamori, Masaki

    AU - Sugiura, Masahito

    AU - Fuwa, Akio

    PY - 1995/2

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    N2 - The equilibria in the Si(s)-Cl2(g) system have been studied at temperature from 1000 to 1300 K using a transpiration reactor. The equilibria are considered among Si(s)-Cl2(g)-SiCl2(g)-SiCl3(g)-SiCl4(g). The standard Gibbs energies of formation for the species of SiCl2(g) and SiCl3(g) species at these temperatures are determined simultaneously, where these subchloride species coexist in appreciable quantities with SiCl4 in the gas phase at these temperatures, as follows: SiCl2(g): ΔG°f·SiCl(2)·T(1000-1300 K)=-185.0-2.32×10-2 T kJ·mol-1 SiCl3(g): ΔG°f·SiCl(3)·T(1000-1300 K)=-401.1+3.28×10-2 T kJ·mol-1

    AB - The equilibria in the Si(s)-Cl2(g) system have been studied at temperature from 1000 to 1300 K using a transpiration reactor. The equilibria are considered among Si(s)-Cl2(g)-SiCl2(g)-SiCl3(g)-SiCl4(g). The standard Gibbs energies of formation for the species of SiCl2(g) and SiCl3(g) species at these temperatures are determined simultaneously, where these subchloride species coexist in appreciable quantities with SiCl4 in the gas phase at these temperatures, as follows: SiCl2(g): ΔG°f·SiCl(2)·T(1000-1300 K)=-185.0-2.32×10-2 T kJ·mol-1 SiCl3(g): ΔG°f·SiCl(3)·T(1000-1300 K)=-401.1+3.28×10-2 T kJ·mol-1

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