| Original language | English |
|---|---|
| Pages (from-to) | 127 |
| Number of pages | 1 |
| Journal | Journal of the Institute of Electrical Engineers of Japan |
| Volume | 134 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2014 |
| Externally published | Yes |
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MEMS
Sensors
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Start and progress of sensors and micro electromechanical systems. / Shoji, Shuichi.
In: Journal of the Institute of Electrical Engineers of Japan, Vol. 134, No. 3, 2014, p. 127.Research output: Contribution to journal › Article
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