| Original language | English |
|---|---|
| Pages (from-to) | 127 |
| Number of pages | 1 |
| Journal | Journal of the Institute of Electrical Engineers of Japan |
| Volume | 134 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2014 |
| Externally published | Yes |
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MEMS
Sensors
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Start and progress of sensors and micro electromechanical systems. / Shoji, Shuichi.
In: Journal of the Institute of Electrical Engineers of Japan, Vol. 134, No. 3, 2014, p. 127.Research output: Contribution to journal › Article
@article{146daf95d1454577a4bb460982fa6f24,
title = "Start and progress of sensors and micro electromechanical systems",
author = "Shuichi Shoji",
year = "2014",
doi = "10.1541/ieejjournal.134.127",
language = "English",
volume = "134",
pages = "127",
journal = "Journal of the Institute of Electrical Engineers of Japan",
issn = "1340-5551",
publisher = "The Institute of Electrical Engineers of Japan",
number = "3",
}
TY - JOUR
T1 - Start and progress of sensors and micro electromechanical systems
AU - Shoji, Shuichi
PY - 2014
Y1 - 2014
UR - http://www.scopus.com/inward/record.url?scp=84896769127&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84896769127&partnerID=8YFLogxK
U2 - 10.1541/ieejjournal.134.127
DO - 10.1541/ieejjournal.134.127
M3 - Article
VL - 134
SP - 127
JO - Journal of the Institute of Electrical Engineers of Japan
JF - Journal of the Institute of Electrical Engineers of Japan
SN - 1340-5551
IS - 3
ER -