Start and progress of sensors and micro electromechanical systems

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)127
Number of pages1
JournalJournal of the Institute of Electrical Engineers of Japan
Volume134
Issue number3
DOIs
Publication statusPublished - 2014
Externally publishedYes

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MEMS
Sensors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Start and progress of sensors and micro electromechanical systems. / Shoji, Shuichi.

In: Journal of the Institute of Electrical Engineers of Japan, Vol. 134, No. 3, 2014, p. 127.

Research output: Contribution to journalArticle

@article{146daf95d1454577a4bb460982fa6f24,
title = "Start and progress of sensors and micro electromechanical systems",
author = "Shuichi Shoji",
year = "2014",
doi = "10.1541/ieejjournal.134.127",
language = "English",
volume = "134",
pages = "127",
journal = "Journal of the Institute of Electrical Engineers of Japan",
issn = "1340-5551",
publisher = "The Institute of Electrical Engineers of Japan",
number = "3",

}

TY - JOUR

T1 - Start and progress of sensors and micro electromechanical systems

AU - Shoji, Shuichi

PY - 2014

Y1 - 2014

UR - http://www.scopus.com/inward/record.url?scp=84896769127&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84896769127&partnerID=8YFLogxK

U2 - 10.1541/ieejjournal.134.127

DO - 10.1541/ieejjournal.134.127

M3 - Article

VL - 134

SP - 127

JO - Journal of the Institute of Electrical Engineers of Japan

JF - Journal of the Institute of Electrical Engineers of Japan

SN - 1340-5551

IS - 3

ER -