State-of-the-Art Technology and Future Prospects of Micro Thermoelectric Generator Devices

Takanobu Watanabe*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)809-812
Number of pages4
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume88
Issue number11
DOIs
Publication statusPublished - 2022

Keywords

  • CMOS process
  • silicon
  • thermoelectric generator

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this