Statistical- and image-noise effects on experimental spectrum of line-edge and line-width roughness

Atsushi Hiraiwa*, Akio Nishida

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Statistical- and image-noise effects on experimental spectrum of line-edge and line-width roughness'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds