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Dive into the research topics of 'Statistically accurate analysis of line width roughness based on discrete power spectrum'. Together they form a unique fingerprint.
Mathematics
Linewidth
Power Spectrum
Roughness
Discrete Spectrum
Averaging
Power Spectral Density
Scanning Electron Microscope
Decrease
Long-range Correlations
Correlation Length
Line
Pixel
Inspection
Finiteness
Error Analysis
Exceed
Fourier transform
Requirements
Interval
Chemical Compounds
Linewidth
Power spectral density
Power spectrum
Surface roughness
Fourier transforms
Electron microscopes
Error analysis
Scanning
Inspection
Pixels
Engineering & Materials Science
Linewidth
Power spectral density
Power spectrum
Surface roughness
Fourier transforms
Electron microscopes
Error analysis
Scanning
Inspection
Pixels
Physics & Astronomy
power spectra
roughness
error analysis
inspection
plateaus
pixels
electron microscopes
intervals
requirements
scanning