Stranski-Krastanov growth of tungsten during chemical vapor deposition revealed by micro-auger electron spectroscopy

Suguru Noda*, Takeshi Tsumura, Jota Fukuhara, Takashi Yoda, Hiroshi Komiyama, Yukihiro Shimogaki

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science

Physics & Astronomy