Fingerprint Dive into the research topics of 'Structural characterization of silicon carbide etched by using a combination of ion implantation and wet chemical etching'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Structural characterization of silicon carbide etched by using a combination of ion implantation and wet chemical etching
T. Henkel, G. Ferro, S. Nishizawa, H. Pressler, Y. Tanaka, H. Tanoue, Naoto Kobayashi
Research output: Chapter in Book/Report/Conference proceeding › Chapter
1
Citation
(Scopus)