Structural characterization of silicon carbide etched by using a combination of ion implantation and wet chemical etching

T. Henkel, G. Ferro, S. Nishizawa, H. Pressler, Y. Tanaka, H. Tanoue, Naoto Kobayashi

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

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Chemical Compounds

Engineering & Materials Science