STRUCTURAL STUDY OF PtSi/(111)Si INTERFACE WITH HIGH-RESOLUTION ELECTRON MICROSCOPY.

Hiroshi Kawarada, Iwao Ohdomari, Shigeo Horiuchi

    Research output: Chapter in Book/Report/Conference proceedingChapter

    6 Citations (Scopus)

    Abstract

    The interface structure between PtSi and (111)Si has been clarified on an atomic scale for the first time, using a 1 MV high-resolution electron microscope. At the interface the transition from the PtSi lattice to the Si lattice is abrupt without the formation of any extra phase. Lattice fringe images show that the interface is heavily undulated and has atomic steps. Large lattice mismatch between PtSi and Si generates these atomic steps and extra half planes of PtSi. The observed relationship between the slope of the interface and the number of extra half planes can be explained by a simple model.

    Original languageEnglish
    Title of host publicationJapanese Journal of Applied Physics, Part 2: Letters
    Volume23
    Edition10
    Publication statusPublished - 1984 Oct

    Fingerprint

    Lattice mismatch
    High resolution electron microscopy
    Electron microscopes

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Kawarada, H., Ohdomari, I., & Horiuchi, S. (1984). STRUCTURAL STUDY OF PtSi/(111)Si INTERFACE WITH HIGH-RESOLUTION ELECTRON MICROSCOPY. In Japanese Journal of Applied Physics, Part 2: Letters (10 ed., Vol. 23)

    STRUCTURAL STUDY OF PtSi/(111)Si INTERFACE WITH HIGH-RESOLUTION ELECTRON MICROSCOPY. / Kawarada, Hiroshi; Ohdomari, Iwao; Horiuchi, Shigeo.

    Japanese Journal of Applied Physics, Part 2: Letters. Vol. 23 10. ed. 1984.

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Kawarada, H, Ohdomari, I & Horiuchi, S 1984, STRUCTURAL STUDY OF PtSi/(111)Si INTERFACE WITH HIGH-RESOLUTION ELECTRON MICROSCOPY. in Japanese Journal of Applied Physics, Part 2: Letters. 10 edn, vol. 23.
    Kawarada H, Ohdomari I, Horiuchi S. STRUCTURAL STUDY OF PtSi/(111)Si INTERFACE WITH HIGH-RESOLUTION ELECTRON MICROSCOPY. In Japanese Journal of Applied Physics, Part 2: Letters. 10 ed. Vol. 23. 1984
    Kawarada, Hiroshi ; Ohdomari, Iwao ; Horiuchi, Shigeo. / STRUCTURAL STUDY OF PtSi/(111)Si INTERFACE WITH HIGH-RESOLUTION ELECTRON MICROSCOPY. Japanese Journal of Applied Physics, Part 2: Letters. Vol. 23 10. ed. 1984.
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