Structure and magnetic property of c -axis oriented L 10 -FePt nanoparticles on TiN/ a-Si underlayers

Yoshiko Tsuji, Suguru Noda, Yukio Yamaguchi

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Abstract

L 10 -FePt is a promising material for high-density perpendicular magnetic recording media. The authors previously reported that c -axis oriented L 10 -FePt nanoparticle monolayers can be formed on (200)-oriented polycrystalline template TiN underlayers on SiO2 by using a conventional sputtering method. In this study, TiN nanostructures, such as the degree of (200) orientation, were improved by first depositing a buffer layer, such as amorphous Si onto SiO2, and the grain size could be controlled by adjusting either the deposition temperature or TiN thickness. When FePt nanoparticles were formed on a template TiN underlayer with a buffer layer of amorphous Si, both their degree of c -axis orientation and their magnetic properties were improved; FePt nanoparticles with nominal thickness of 1.4 nm had coercivity of 12.9 kOe in the out-of-plane direction at 300 K.

Original languageEnglish
Pages (from-to)1892-1895
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume25
Issue number6
DOIs
Publication statusPublished - 2007
Externally publishedYes

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

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