Structure and thermophysical properties of GaN films deposited by reactive sputtering using a metal Ga target

Yuji Isosaki, Yuichiro Yamashita, Takashi Yagi, Junjun Jia, Naoyuki Taketoshi, Shinichi Nakamura, Yuzo Shigesato

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy