Structure modification of M-AFM probe for the measurement of local conductivity

A. Fujimoto, L. Zhang, Atsushi Hosoi, Y. Ju

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In order to realize the evaluation of electrical properties of materials in nanometer scale, a method to measure the local conductivity of materials was demonstrated. A microwave atomic force microscope (M-AFM) probe which can propagate and emit microwave signals was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam fabrication. The M-AFM combined a network analyzer and an AFM was used to measure a sample. The amplitude and phase of the reflection coefficient of the microwave signals were measured, thereby the electrical conductivities of metallic materials were determined. The conductivity obtained by this method is agreement well with that measured by a high-frequency conductometry.

Original languageEnglish
Pages (from-to)715-720
Number of pages6
JournalMicrosystem Technologies
Volume17
Issue number4
DOIs
Publication statusPublished - 2011 Apr
Externally publishedYes

Fingerprint

Microscopes
microscopes
Microwaves
microwaves
conductivity
probes
Electric network analyzers
Focused ion beams
analyzers
Electric properties
Waveguides
ion beams
electrical properties
atomic force microscopy
waveguides
reflectance
Fabrication
fabrication
electrical resistivity
evaluation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Structure modification of M-AFM probe for the measurement of local conductivity. / Fujimoto, A.; Zhang, L.; Hosoi, Atsushi; Ju, Y.

In: Microsystem Technologies, Vol. 17, No. 4, 04.2011, p. 715-720.

Research output: Contribution to journalArticle

@article{733aa915d1fe450c93a96361118fbb43,
title = "Structure modification of M-AFM probe for the measurement of local conductivity",
abstract = "In order to realize the evaluation of electrical properties of materials in nanometer scale, a method to measure the local conductivity of materials was demonstrated. A microwave atomic force microscope (M-AFM) probe which can propagate and emit microwave signals was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam fabrication. The M-AFM combined a network analyzer and an AFM was used to measure a sample. The amplitude and phase of the reflection coefficient of the microwave signals were measured, thereby the electrical conductivities of metallic materials were determined. The conductivity obtained by this method is agreement well with that measured by a high-frequency conductometry.",
author = "A. Fujimoto and L. Zhang and Atsushi Hosoi and Y. Ju",
year = "2011",
month = "4",
doi = "10.1007/s00542-010-1175-9",
language = "English",
volume = "17",
pages = "715--720",
journal = "Microsystem Technologies",
issn = "0946-7076",
publisher = "Springer Verlag",
number = "4",

}

TY - JOUR

T1 - Structure modification of M-AFM probe for the measurement of local conductivity

AU - Fujimoto, A.

AU - Zhang, L.

AU - Hosoi, Atsushi

AU - Ju, Y.

PY - 2011/4

Y1 - 2011/4

N2 - In order to realize the evaluation of electrical properties of materials in nanometer scale, a method to measure the local conductivity of materials was demonstrated. A microwave atomic force microscope (M-AFM) probe which can propagate and emit microwave signals was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam fabrication. The M-AFM combined a network analyzer and an AFM was used to measure a sample. The amplitude and phase of the reflection coefficient of the microwave signals were measured, thereby the electrical conductivities of metallic materials were determined. The conductivity obtained by this method is agreement well with that measured by a high-frequency conductometry.

AB - In order to realize the evaluation of electrical properties of materials in nanometer scale, a method to measure the local conductivity of materials was demonstrated. A microwave atomic force microscope (M-AFM) probe which can propagate and emit microwave signals was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam fabrication. The M-AFM combined a network analyzer and an AFM was used to measure a sample. The amplitude and phase of the reflection coefficient of the microwave signals were measured, thereby the electrical conductivities of metallic materials were determined. The conductivity obtained by this method is agreement well with that measured by a high-frequency conductometry.

UR - http://www.scopus.com/inward/record.url?scp=79958812360&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79958812360&partnerID=8YFLogxK

U2 - 10.1007/s00542-010-1175-9

DO - 10.1007/s00542-010-1175-9

M3 - Article

AN - SCOPUS:79958812360

VL - 17

SP - 715

EP - 720

JO - Microsystem Technologies

JF - Microsystem Technologies

SN - 0946-7076

IS - 4

ER -