Structure modification of M-AFM probe for the measurement of local conductivity

A. Fujimoto, L. Zhang, A. Hosoi, Y. Ju

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In order to realize the evaluation of electrical properties of materials in nanometer scale, a method to measure the local conductivity of materials was demonstrated. A microwave atomic force microscope (M-AFM) probe which can propagate and emit microwave signals was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam fabrication. The M-AFM combined a network analyzer and an AFM was used to measure a sample. The amplitude and phase of the reflection coefficient of the microwave signals were measured, thereby the electrical conductivities of metallic materials were determined. The conductivity obtained by this method is agreement well with that measured by a high-frequency conductometry.

Original languageEnglish
Pages (from-to)715-720
Number of pages6
JournalMicrosystem Technologies
Volume17
Issue number4
DOIs
Publication statusPublished - 2011 Apr

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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