Structure modification of M-AFM probe for the measurement of local conductivity

A. Fujimoto, L. Zhang, A. Hosoi, Y. Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In order to realize the evaluation of electrical properties of materials in nanoscale orders, a method for the measurement of local conductivity was presented. A microwave atomic force microscope (M-AFM) probe in which microwave signals can propagate was fabricated. An open structure of a waveguide at the tip of the probe was introduced by focused ion beam (FIB) fabrication. The microwave measurement system consisted of the combination of a network analyzer working at 44.5 GHz and an AFM were used to measure the samples without contact. The amplitude and phase of the reflection coefficient of the microwave signal were measured to determine the electrical conductivity of non magnetic metals. The conductivity obtained by this method agrees with that measured by the high-frequency conductometry.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Pages22-26
Number of pages5
Publication statusPublished - 2010 Oct 18
Externally publishedYes
EventSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain
Duration: 2010 May 52010 May 7

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Conference

ConferenceSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
CountrySpain
CitySeville
Period10/5/510/5/7

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Fujimoto, A., Zhang, L., Hosoi, A., & Ju, Y. (2010). Structure modification of M-AFM probe for the measurement of local conductivity. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 (pp. 22-26). [5486451] (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010).