Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer

H. Shinohara, T. Suzuki, J. Mizuno, S. Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

To investigate the mechanism underlying the low-temperature direct bonding of cyclo-olefin polymer (COP), ATR-FT-IR and XPS surface analysis methods and contact angle measurements were carried out for COP samples. Oxygen plasma, vacuum-ultraviolet (VUV), and VUV/O3 were selected for pretreatment. Surface analyses results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate hydrogen bonds on the surfaces of the pretreated COPs at room temperature. After annealing, some hydrogen bonds are expected to change to -C-O-C-. This bond becomes strong after pretreatment followed by low-temperature bonding.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1039-1042
Number of pages4
DOIs
Publication statusPublished - 2009 Dec 11
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: 2009 Jun 212009 Jun 25

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

ConferenceTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period09/6/2109/6/25

Keywords

  • Cyclo-olefin polymer
  • Direct bonding
  • Oxygen plasma
  • Vacuum ultraviolet light

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Shinohara, H., Suzuki, T., Mizuno, J., & Shoji, S. (2009). Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymer. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1039-1042). [5285966] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285966