Studies on low-temperature direct bonding of VUV/O3-, VUV- and O2 plasma-pre-treated poly-methylmethacrylate

Hidetoshi Shinohara*, Takashi Kasahara, Shuichi Shoji, Jun Mizuno

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

45 Citations (Scopus)


Low-temperature direct bonding of poly-methylmethacrylate (PMMA) plates was achieved by pre-treatment with vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O3), with vacuum ultraviolet irradiation in a nitrogen atmosphere (VUV), or with oxygen plasma. Based on surface analysis by attenuated total reflection Fourier-transform infrared spectrometry (ATR-FT-IR), x-ray photoelectron spectroscopy and near edge x-ray absorption fine structure spectroscopy, chemical changes of the PMMA surface after the pre-treatment were investigated. Changes in morphology and softening point were also investigated by nano-thermal analysis and atomic force microscopy. From the results, the bonding mechanisms proposed are described as follows: during the bonding process, the increased or generated polar groups cause an increase in the dipolar interactions (such as hydrogen bonding) between two pre-treated PMMA surfaces; in the case of VUV/O3 or VUV pre-treatment, a low-T g layer is generated on the surface and this layer acts as an adhesive for the direct bonding of layers by diffusion.

Original languageEnglish
Article number085028
JournalJournal of Micromechanics and Microengineering
Issue number8
Publication statusPublished - 2011

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


Dive into the research topics of 'Studies on low-temperature direct bonding of VUV/O3-, VUV- and O2 plasma-pre-treated poly-methylmethacrylate'. Together they form a unique fingerprint.

Cite this