TY - JOUR
T1 - Study of ion-beam-induced epitaxy in Si by slow positron annihilation and RBS channeling
AU - Hayashi, N.
AU - Suzuki, R.
AU - Watanabe, H.
AU - Sakamoto, I.
AU - Kobayashi, Naoto
AU - Mikado, T.
AU - Yamazaki, T.
AU - Kuriyama, K.
PY - 1993
Y1 - 1993
N2 - RBS channeling analysis and positron annihilation measurements were used to study ion beam induced crystallization in silicon. The epitaxial regrowth of amorphous surface layers in 〈100〉 oriented Si substrate has been performed under irradiation with 400 keV Ar+ ions at the temperature of 400°C. A slow positron pulsing system was used to measure lifetime spectra in the recrystallised near-surface region, and the lifetime was found to increase by 40-70 ps, compared to the as-amorphized state, whereas RBS channeling shows a crystalline recovery from the amorphous structure. The results indicate that vacancy migration and clustering are promoted during the epitaxial recrystallization.
AB - RBS channeling analysis and positron annihilation measurements were used to study ion beam induced crystallization in silicon. The epitaxial regrowth of amorphous surface layers in 〈100〉 oriented Si substrate has been performed under irradiation with 400 keV Ar+ ions at the temperature of 400°C. A slow positron pulsing system was used to measure lifetime spectra in the recrystallised near-surface region, and the lifetime was found to increase by 40-70 ps, compared to the as-amorphized state, whereas RBS channeling shows a crystalline recovery from the amorphous structure. The results indicate that vacancy migration and clustering are promoted during the epitaxial recrystallization.
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U2 - 10.1016/0168-583X(93)90726-M
DO - 10.1016/0168-583X(93)90726-M
M3 - Article
AN - SCOPUS:43949175374
SN - 0168-583X
VL - 80-81
SP - 1006
EP - 1009
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - PART 2
ER -