Study on formation mechanism of (112̄0) textured Zno films

Takayuki Kawamoto, Mami Matsukawa, Yoshiaki Watanabe, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

The ZnO films where crystallites c-axis are unidirectionally aligned in the substrate plane ((112̄0) textured ZnO films) realize shear mode devices. In this study, we have studied the formation mechanism of the (112̄0) textured ZnO film, focusing on the effect of total pressure and partial pressure of oxygen and argon during sputtering deposition. In addition to the X-ray diffraction (XRD) measurement of the films, optical emissions from the RF plasma were analyzed to investigate the effect of ionic species on the growth of the ZnO films. Highly crystallized (112̄0) textured ZnO films were obtained in conditions of low total gas pressure and high oxygen concentration. In these conditions, strong optical emission spectra from oxygen species were strongly observed. The best shear mode electromechanical coupling coefficient k 15 of the film was 0.16, which was 62 % of the value of single crystal.

Original languageEnglish
Title of host publication2006 IEEE International Ultrasonics Symposium, IUS
Pages1529-1532
Number of pages4
DOIs
Publication statusPublished - 2006 Dec 1

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume1
ISSN (Print)1051-0117

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Keywords

  • (112̄0) textured ZnO films; RF magnetron sputtering; optical emission spectroscopy

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Kawamoto, T., Matsukawa, M., Watanabe, Y., & Yanagitani, T. (2006). Study on formation mechanism of (112̄0) textured Zno films. In 2006 IEEE International Ultrasonics Symposium, IUS (pp. 1529-1532). [4152244] (Proceedings - IEEE Ultrasonics Symposium; Vol. 1). https://doi.org/10.1109/ULTSYM.2006.388