Study on low-temperature crystallization of SrBi 2Ta 2O 9 thin films prepared by sol-gel method using steam curing process

Yoshihiro Sawada, Hideya Kobari, Yoshimi Sato, Akira Hashimoto, Ichiro Koiwa, Hiroyo Kobayashi, Tetsuya Osaka

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

Abstract

We have been developing our original hydrolyzed sol-gel coating solutions for the SrBi 2Ta 2O 9 (SBT) thin film. The molecular structure of the solution can be controlled by hydrolysis. We studied the SBT thin film forming process using these coating solutions with the steam curing process used together and observed lower crystallization temperature and improvement of crystal orientation.

Original languageEnglish
Title of host publicationIntegrated Ferroelectrics
PublisherGordon & Breach Science Publ Inc
Pages187-195
Number of pages9
Volume26
Edition1
Publication statusPublished - 1999
EventThe 11th International Symposium on Integrated Ferroelectrics (ISIF99) - Colorado Springs, CO, USA
Duration: 1999 Mar 71999 Mar 10

Other

OtherThe 11th International Symposium on Integrated Ferroelectrics (ISIF99)
CityColorado Springs, CO, USA
Period99/3/799/3/10

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Sawada, Y., Kobari, H., Sato, Y., Hashimoto, A., Koiwa, I., Kobayashi, H., & Osaka, T. (1999). Study on low-temperature crystallization of SrBi 2Ta 2O 9 thin films prepared by sol-gel method using steam curing process In Integrated Ferroelectrics (1 ed., Vol. 26, pp. 187-195). Gordon & Breach Science Publ Inc.