Abstract
We have been developing our original hydrolyzed sol-gel coating solutions for the SrBi2Ta2O9 (SBT) thin film. The molecular structure of the solution can be controlled by hydrolysis. We studied the SBT thin film forming process using these coating solutions with the steam curing process used together and observed lower crystallization temperature and improvement of crystal orientation.
Original language | English |
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Pages (from-to) | 187-195 |
Number of pages | 9 |
Journal | Integrated Ferroelectrics |
Volume | 26 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1999 |
Event | The 11th International Symposium on Integrated Ferroelectrics (ISIF99) - Colorado Springs, CO, USA Duration: 1999 Mar 7 → 1999 Mar 10 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry