Study on low-temperature crystallization of SrBi2Ta2O9 thin films prepared by sol-gel method using steam curing process

Yoshihiro Sawada, Hideya Kobari, Yoshimi Sato, Akira Hashimoto, Ichiro Koiwa, Hiroyo Kobayashi, Tetsuya Osaka

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


We have been developing our original hydrolyzed sol-gel coating solutions for the SrBi2Ta2O9 (SBT) thin film. The molecular structure of the solution can be controlled by hydrolysis. We studied the SBT thin film forming process using these coating solutions with the steam curing process used together and observed lower crystallization temperature and improvement of crystal orientation.

Original languageEnglish
Pages (from-to)187-195
Number of pages9
JournalIntegrated Ferroelectrics
Issue number1
Publication statusPublished - 1999
EventThe 11th International Symposium on Integrated Ferroelectrics (ISIF99) - Colorado Springs, CO, USA
Duration: 1999 Mar 71999 Mar 10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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