Study on UV/EB nanoimprint lithography using nano-/micro-fabricated crosslinked PTFE Mold

Tomohiro Takahashi; Yuya Takasawa; Tomoko Gowa; Satoshi Okubo; Takashi Sasaki; Takaharu Miura; Akihiro Oshima; Seiichi Tagawa; Masakazu Washio

doi:10.2494/photopolymer.23.69

Study on UV/EB nanoimprint lithography using nano-/micro-fabricated crosslinked PTFE Mold

Tomohiro Takahashi, Yuya Takasawa, Tomoko Gowa, Satoshi Okubo, Takashi Sasaki, Takaharu Miura, Akihiro Oshima, Seiichi Tagawa, Masakazu Washio

School of Advanced Science and Engineering

Research output: Contribution to journal › Article

7 Citations (Scopus)

Abstract

Nano-/micro-scale structures of crosslinked polytetrafluoroethylene (RX-PTFE) have been directly fabricated by focused ion beam (FIB). In this study, the nano-/micro-fabricated RX-PTFE were attempted to be applied for the polymeric molds of nanoimprint lithography (NIL). The ability of the RX-PTFE mold for electron beam NIL (EB-NIL) was evaluated by the imprinted patterns, and compared with ultraviolet NIL (UV-NIL) method. The RX-PTFE molds and the imprinted structures obtained by UV- /EB-NIL were observed by a field emission scanning electron microscope (FE-SEM) and a scanning electron microscope (SEM). The height of imprinted structures was 860 nm, and the thinnest line width achieved in the experiments showed 180 nm with EB-NIL process. The estimated aspect ratio was 4.8.

Original language	English
Pages (from-to)	69-74
Number of pages	6
Journal	Journal of Photopolymer Science and Technology
Volume	23
Issue number	1
DOIs	https://doi.org/10.2494/photopolymer.23.69
Publication status	Published - 2010 Oct 1

Keywords

Crosslinked PTFE
EB
Nanoimprint lithography
TMPTA
UV

ASJC Scopus subject areas

Polymers and Plastics
Organic Chemistry
Materials Chemistry

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Takahashi, T., Takasawa, Y., Gowa, T., Okubo, S., Sasaki, T., Miura, T., Oshima, A., Tagawa, S., & Washio, M. (2010). Study on UV/EB nanoimprint lithography using nano-/micro-fabricated crosslinked PTFE Mold. Journal of Photopolymer Science and Technology, 23(1), 69-74. https://doi.org/10.2494/photopolymer.23.69

Study on UV/EB nanoimprint lithography using nano-/micro-fabricated crosslinked PTFE Mold. / Takahashi, Tomohiro; Takasawa, Yuya; Gowa, Tomoko; Okubo, Satoshi; Sasaki, Takashi; Miura, Takaharu; Oshima, Akihiro; Tagawa, Seiichi; Washio, Masakazu.

In: Journal of Photopolymer Science and Technology, Vol. 23, No. 1, 01.10.2010, p. 69-74.

Research output: Contribution to journal › Article

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abstract = "Nano-/micro-scale structures of crosslinked polytetrafluoroethylene (RX-PTFE) have been directly fabricated by focused ion beam (FIB). In this study, the nano-/micro-fabricated RX-PTFE were attempted to be applied for the polymeric molds of nanoimprint lithography (NIL). The ability of the RX-PTFE mold for electron beam NIL (EB-NIL) was evaluated by the imprinted patterns, and compared with ultraviolet NIL (UV-NIL) method. The RX-PTFE molds and the imprinted structures obtained by UV- /EB-NIL were observed by a field emission scanning electron microscope (FE-SEM) and a scanning electron microscope (SEM). The height of imprinted structures was 860 nm, and the thinnest line width achieved in the experiments showed 180 nm with EB-NIL process. The estimated aspect ratio was 4.8.",

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