Sub-quarter-micron dual gate CMOSFETs with ultra-thin gate oxide of 2nm

T. Kuroi, S. Shimizu, S. Ogino, A. Teramoto, M. Shirahata, Y. Okumura, M. Inuishi, H. Miyoshi

Research output: Contribution to journalConference articlepeer-review

11 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science