Substitution and electrical activation of carbon in C- and C + P-implanted InP

K. Kushida, O. Ogawa, K. Kuriyama*, N. Hayashi, M. Ogura, M. Hasegawa, Naoto Kobayashi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds