@article{12934dcd42cb418290fa01ae873b9381,
title = "Super high rate thermal plasma CVD of ceramics",
author = "Hideyuki Murakami and Hifumi Nagai and Tohru Irokawa and Toyonobu Yoshida and Kazuo Akashi",
year = "1989",
doi = "10.2109/jcersj.97.49",
language = "English",
volume = "97",
pages = "49--55",
journal = "Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan",
issn = "1882-0743",
publisher = "Ceramic Society of Japan/Nippon Seramikkusu Kyokai",
number = "1",
}