Super high rate thermal plasma CVD of ceramics

Hideyuki Murakami, Hifumi Nagai, Tohru Irokawa, Toyonobu Yoshida, Kazuo Akashi

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)49-55
Number of pages7
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Issue number1
Publication statusPublished - 1989
Externally publishedYes

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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