Superior Schottky electrode of RuO2 for deep level transient spectroscopy on anatase TiO2

Takahira Miyagi, Masayuki Kamei, Takefumi Mitsuhashi, Atsushi Yamazaki

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

An anatase TiO2 film was epitaxially grown on a conductive Nb-doped single crystalline SrTiO3 substrate. RuO2 Schottky electrode was fabricated on the epitaxial anatase film. The dark current-voltage and capacitance-voltage characteristics for the RuO 2/anatase junction were plotted. The junction enabled deep level transient spectroscopy in the high-temperature region.

Original languageEnglish
Pages (from-to)1782-1784
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number9
DOIs
Publication statusPublished - 2003 Sep 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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