Surface and microstructural characterization of homoepitaxial silicon grown by pulsed laser deposition

J. S. Pelt, Jr Magaña R., M. E. Ramsey, E. Poindexter, S. Atwell, J. P. Zheng, S. M. Durbin, Masakazu Kobayashi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    There is a great deal of interest in thin film deposition techniques which can achieve good crystal quality at low substrate temperatures. Pulsed laser deposition (PLD), well-known as a reliable technique for fabrication of high critical temperature superconductor thin films, has a number of characteristics which may make it suitable for such applications. In particular, PLD is characterized by a relatively large average species energy, which can be controlled by the laser fluence at the target. This paper describes the growth of silicon on silicon films using PLD over substrate temperatures between 500 and 700 °C, and in-situ characterization using reflection high-energy electron diffraction (RHEED). Transmission electron microscopy confirms the growth of single crystal oriented films, and atomic force microscopy indicates smooth films with an rms surface roughness of less than 2 Å.

    Original languageEnglish
    Title of host publicationMaterials Research Society Symposium - Proceedings
    EditorsH.N.G. Wadley, G.H. Gilmer, W.G. Barker
    Pages75-80
    Number of pages6
    Volume616
    Publication statusPublished - 2000
    EventNew Methods, Mechanisms and Models of Vapor Deposition - San Francisco, CA, United States
    Duration: 2000 Apr 242000 Apr 26

    Other

    OtherNew Methods, Mechanisms and Models of Vapor Deposition
    CountryUnited States
    CitySan Francisco, CA
    Period00/4/2400/4/26

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    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials

    Cite this

    Pelt, J. S., Magaña R., J., Ramsey, M. E., Poindexter, E., Atwell, S., Zheng, J. P., Durbin, S. M., & Kobayashi, M. (2000). Surface and microstructural characterization of homoepitaxial silicon grown by pulsed laser deposition. In H. N. G. Wadley, G. H. Gilmer, & W. G. Barker (Eds.), Materials Research Society Symposium - Proceedings (Vol. 616, pp. 75-80)