Surface order evaluation of the heteroepitaxial diamond film grown on an inclined β-SiC(001)

Shozo Kono, Tadahiko Goto, Tadashi Abukawa, Christph Wild, Peter Koidl, Hiroshi Kawarada

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The surface order of a heterocpitaxial diamond (001) film grown on an inclined β-SiC(001) has been evaluated with a micro-electron beam in ultra-high-vacuum. It was determined that the range of order of surface dimer-rows of the heterocpitaxial diamond film is ∼15 Å.

Original languageEnglish
Pages (from-to)4372-4373
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume39
Issue number7 B
DOIs
Publication statusPublished - 2000

Keywords

  • C(001)
  • Diamond surface
  • Heteroepitaxial diamond film
  • Micro-electron beam RHEED
  • UHV-SEM

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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