Surface order evaluation of the heteroepitaxial diamond film grown on an inclined β-SiC(001)

Shozo Kono, Tadahiko Goto, Tadashi Abukawa, Christph Wild, Peter Koidl, Hiroshi Kawarada

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    Abstract

    The surface order of a heterocpitaxial diamond (001) film grown on an inclined β-SiC(001) has been evaluated with a micro-electron beam in ultra-high-vacuum. It was determined that the range of order of surface dimer-rows of the heterocpitaxial diamond film is ∼15 Å.

    Original languageEnglish
    Pages (from-to)4372-4373
    Number of pages2
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Volume39
    Issue number7 B
    Publication statusPublished - 2000

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    Keywords

    • C(001)
    • Diamond surface
    • Heteroepitaxial diamond film
    • Micro-electron beam RHEED
    • UHV-SEM

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

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