Surface topography of sputtered CuxMo6S8 films

R. Ohtaki, B. R. Zhao, H. L. Luo, N. M. Davis

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

The Chevrel phase CuxMo6S8 was prepared with the technique of sputtering, and its surface micro-structure was observed using scanning electron microscopes (SEM). It was found that the surface micro-structure depends strongly on the sputtering conditions, particularly on the substrate temperature. An attempt to obtain smooth film surfaces for analytical purposes was successful.

Original languageEnglish
Pages (from-to)575-578
Number of pages4
JournalMaterials Research Bulletin
Volume17
Issue number5
DOIs
Publication statusPublished - 1982 May
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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