Synchronous modulation in scanning Auger electron microscopy

K. Goto, S. Ichimura, R. Shimizu

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The modulation frequency on the cylindrical mirror analyzer of a scanning Auger microscope has been synchronized to the digital scanning system. This technique allows one to obtain an Auger image free from moiré patterns which arise from the beat between scanning and modulation frequencies, and permits operation at frequency settings which optimize use of the electronics in the detection system.

Original languageEnglish
Pages (from-to)46-47
Number of pages2
JournalReview of Scientific Instruments
Volume50
Issue number1
DOIs
Publication statusPublished - 1979 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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