Synthesis of highly oriented and dense conical carbon nanofibers by a DC bias-enhanced microwave plasma CVD method

Goufang Zhong, Takayuki Iwasaki, Hiroshi Kawarada, Iwao Ohdomari

    Research output: Contribution to journalArticle

    11 Citations (Scopus)

    Abstract

    Conical carbon nanofibers (CCNFs) have been synthesized on Si substrates coated with a Fe thin film of a few nanometers in thickness by a DC bias-enhanced microwave plasma chemical vapor deposition (CVD) method using H2 and CH4 as reactant gases under a chamber pressure of about 230 Pa. Without DC bias, only catalytic nanoparticles could be observed by field emission scanning electron microscopy (FE-SEM) on substrate surface after growth. Highly oriented and dense CCNFs could be deposited when a negative DC bias in the range of 150-230 V was applied to the substrate holder during growth. The average density of CCNFs was measured as being of the order of 1010 cm-2, while the average length was of the order of 102 nm, and the conical angle was in the range of 10-15°. The relationships between the density, the root diameter and the length of CCNFs are discussed.

    Original languageEnglish
    Pages (from-to)315-318
    Number of pages4
    JournalThin Solid Films
    Volume464-465
    DOIs
    Publication statusPublished - 2004 Oct

    Fingerprint

    Carbon nanofibers
    Chemical vapor deposition
    direct current
    Microwaves
    vapor deposition
    Plasmas
    microwaves
    carbon
    synthesis
    Substrates
    pressure chambers
    holders
    Field emission
    field emission
    Gases
    Nanoparticles
    Thin films
    nanoparticles
    Scanning electron microscopy
    scanning electron microscopy

    Keywords

    • Conical angle
    • Conical carbon nanofibers
    • DC bias
    • Density
    • Diameter
    • Microwave plasma CVD

    ASJC Scopus subject areas

    • Surfaces, Coatings and Films
    • Condensed Matter Physics
    • Surfaces and Interfaces

    Cite this

    Synthesis of highly oriented and dense conical carbon nanofibers by a DC bias-enhanced microwave plasma CVD method. / Zhong, Goufang; Iwasaki, Takayuki; Kawarada, Hiroshi; Ohdomari, Iwao.

    In: Thin Solid Films, Vol. 464-465, 10.2004, p. 315-318.

    Research output: Contribution to journalArticle

    @article{91e8056f13214ecea87e0b1be002072e,
    title = "Synthesis of highly oriented and dense conical carbon nanofibers by a DC bias-enhanced microwave plasma CVD method",
    abstract = "Conical carbon nanofibers (CCNFs) have been synthesized on Si substrates coated with a Fe thin film of a few nanometers in thickness by a DC bias-enhanced microwave plasma chemical vapor deposition (CVD) method using H2 and CH4 as reactant gases under a chamber pressure of about 230 Pa. Without DC bias, only catalytic nanoparticles could be observed by field emission scanning electron microscopy (FE-SEM) on substrate surface after growth. Highly oriented and dense CCNFs could be deposited when a negative DC bias in the range of 150-230 V was applied to the substrate holder during growth. The average density of CCNFs was measured as being of the order of 1010 cm-2, while the average length was of the order of 102 nm, and the conical angle was in the range of 10-15°. The relationships between the density, the root diameter and the length of CCNFs are discussed.",
    keywords = "Conical angle, Conical carbon nanofibers, DC bias, Density, Diameter, Microwave plasma CVD",
    author = "Goufang Zhong and Takayuki Iwasaki and Hiroshi Kawarada and Iwao Ohdomari",
    year = "2004",
    month = "10",
    doi = "10.1016/j.tsf.2004.06.051",
    language = "English",
    volume = "464-465",
    pages = "315--318",
    journal = "Thin Solid Films",
    issn = "0040-6090",
    publisher = "Elsevier",

    }

    TY - JOUR

    T1 - Synthesis of highly oriented and dense conical carbon nanofibers by a DC bias-enhanced microwave plasma CVD method

    AU - Zhong, Goufang

    AU - Iwasaki, Takayuki

    AU - Kawarada, Hiroshi

    AU - Ohdomari, Iwao

    PY - 2004/10

    Y1 - 2004/10

    N2 - Conical carbon nanofibers (CCNFs) have been synthesized on Si substrates coated with a Fe thin film of a few nanometers in thickness by a DC bias-enhanced microwave plasma chemical vapor deposition (CVD) method using H2 and CH4 as reactant gases under a chamber pressure of about 230 Pa. Without DC bias, only catalytic nanoparticles could be observed by field emission scanning electron microscopy (FE-SEM) on substrate surface after growth. Highly oriented and dense CCNFs could be deposited when a negative DC bias in the range of 150-230 V was applied to the substrate holder during growth. The average density of CCNFs was measured as being of the order of 1010 cm-2, while the average length was of the order of 102 nm, and the conical angle was in the range of 10-15°. The relationships between the density, the root diameter and the length of CCNFs are discussed.

    AB - Conical carbon nanofibers (CCNFs) have been synthesized on Si substrates coated with a Fe thin film of a few nanometers in thickness by a DC bias-enhanced microwave plasma chemical vapor deposition (CVD) method using H2 and CH4 as reactant gases under a chamber pressure of about 230 Pa. Without DC bias, only catalytic nanoparticles could be observed by field emission scanning electron microscopy (FE-SEM) on substrate surface after growth. Highly oriented and dense CCNFs could be deposited when a negative DC bias in the range of 150-230 V was applied to the substrate holder during growth. The average density of CCNFs was measured as being of the order of 1010 cm-2, while the average length was of the order of 102 nm, and the conical angle was in the range of 10-15°. The relationships between the density, the root diameter and the length of CCNFs are discussed.

    KW - Conical angle

    KW - Conical carbon nanofibers

    KW - DC bias

    KW - Density

    KW - Diameter

    KW - Microwave plasma CVD

    UR - http://www.scopus.com/inward/record.url?scp=4544297965&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=4544297965&partnerID=8YFLogxK

    U2 - 10.1016/j.tsf.2004.06.051

    DO - 10.1016/j.tsf.2004.06.051

    M3 - Article

    VL - 464-465

    SP - 315

    EP - 318

    JO - Thin Solid Films

    JF - Thin Solid Films

    SN - 0040-6090

    ER -