Synthesis of SiC layer on metal silicon from SiO by a chemical vapor deposition process

Norihiro Murakawa*, Tomonori Iizuka, Masanori Eguchi, Kohei Tatsumi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Synthesis of SiC layer on metal silicon from SiO by a chemical vapor deposition process'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy