Tapered waveguide by liquid for a coupler of optical fibers to mems devices

Hisashi Terae, Binh Khiem Nguyen, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We report a tapered liquid waveguide for an optical fiber-to-chip coupler. The tapered liquid waveguide has a smooth surface and has both a large structure and a micro structure on one chip. The waveguide is able to couple optical fibers of large-diameter to small MEMS devices. A Parylene film on the liquid prevented the liquid from deformation and evaporation. We fabricated the silicone oil waveguide by hydrophobicity of CYTOP. We measured a propagation loss of the tapered waveguide by entering the laser beam from the incident face. From a measurement result, this tapered waveguide can be a coupler which connects optical fibers to MEMS devices.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages794-797
Number of pages4
DOIs
Publication statusPublished - 2008 Aug 29
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 2008 Jan 132008 Jan 17

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Tapered waveguide by liquid for a coupler of optical fibers to mems devices'. Together they form a unique fingerprint.

  • Cite this

    Terae, H., Nguyen, B. K., Takahata, T., Iwase, E., Matsumoto, K., & Shimoyama, I. (2008). Tapered waveguide by liquid for a coupler of optical fibers to mems devices. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 794-797). [4443776] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443776