Tapered waveguide by liquid for a coupler of optical fibers to mems devices

Hisashi Terae, Binh Khiem Nguyen, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We report a tapered liquid waveguide for an optical fiber-to-chip coupler. The tapered liquid waveguide has a smooth surface and has both a large structure and a micro structure on one chip. The waveguide is able to couple optical fibers of large-diameter to small MEMS devices. A Parylene film on the liquid prevented the liquid from deformation and evaporation. We fabricated the silicone oil waveguide by hydrophobicity of CYTOP. We measured a propagation loss of the tapered waveguide by entering the laser beam from the incident face. From a measurement result, this tapered waveguide can be a coupler which connects optical fibers to MEMS devices.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages794-797
Number of pages4
DOIs
Publication statusPublished - 2008
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ
Duration: 2008 Jan 132008 Jan 17

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CityTucson, AZ
Period08/1/1308/1/17

Fingerprint

Optical fibers
Waveguides
Liquids
MEMS
Hydrophobicity
Silicones
Laser beams
Evaporation
Microstructure

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Terae, H., Nguyen, B. K., Takahata, T., Iwase, E., Matsumoto, K., & Shimoyama, I. (2008). Tapered waveguide by liquid for a coupler of optical fibers to mems devices. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 794-797). [4443776] https://doi.org/10.1109/MEMSYS.2008.4443776

Tapered waveguide by liquid for a coupler of optical fibers to mems devices. / Terae, Hisashi; Nguyen, Binh Khiem; Takahata, Tomoyuki; Iwase, Eiji; Matsumoto, Kiyoshi; Shimoyama, Isao.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. p. 794-797 4443776.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Terae, H, Nguyen, BK, Takahata, T, Iwase, E, Matsumoto, K & Shimoyama, I 2008, Tapered waveguide by liquid for a coupler of optical fibers to mems devices. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4443776, pp. 794-797, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443776
Terae H, Nguyen BK, Takahata T, Iwase E, Matsumoto K, Shimoyama I. Tapered waveguide by liquid for a coupler of optical fibers to mems devices. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. p. 794-797. 4443776 https://doi.org/10.1109/MEMSYS.2008.4443776
Terae, Hisashi ; Nguyen, Binh Khiem ; Takahata, Tomoyuki ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / Tapered waveguide by liquid for a coupler of optical fibers to mems devices. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. pp. 794-797
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