TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films

Hong Sun, Yutaka Itoh, Kenji Hanafusa, Kazuhito Kamei, Toshiro Tomida

Research output: Contribution to journalArticle

Abstract

The planar-view and cross-sectional microstructures of binary Sm-Fe magnetic thin films deposited on quartz glass substrates by the RF-sputtering method are investigated using a transmission electron microscope (TEM). The cross-sectional micrographs and TEM diffraction patterns show decent columnar structures in the films and special crystallographic orientations. The magnetic properties of Sm-Fe thin films can also be well explained by their microstructural characteristics.

Original languageEnglish
Pages (from-to)458-460
Number of pages3
JournalJournal of Electron Microscopy
Volume45
Issue number5
Publication statusPublished - 1996
Externally publishedYes

Fingerprint

Magnetic thin films
Electron microscopes
electron microscopes
Observation
Electrons
microstructure
Microstructure
Quartz
thin films
Diffraction patterns
Glass
Sputtering
Magnetic properties
diffraction patterns
quartz
sputtering
magnetic properties
Thin films
glass
Substrates

Keywords

  • Magnetic
  • Microstructure
  • Sm-Fe
  • TEM
  • Thin film

ASJC Scopus subject areas

  • Instrumentation

Cite this

Sun, H., Itoh, Y., Hanafusa, K., Kamei, K., & Tomida, T. (1996). TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films. Journal of Electron Microscopy, 45(5), 458-460.

TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films. / Sun, Hong; Itoh, Yutaka; Hanafusa, Kenji; Kamei, Kazuhito; Tomida, Toshiro.

In: Journal of Electron Microscopy, Vol. 45, No. 5, 1996, p. 458-460.

Research output: Contribution to journalArticle

Sun, H, Itoh, Y, Hanafusa, K, Kamei, K & Tomida, T 1996, 'TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films', Journal of Electron Microscopy, vol. 45, no. 5, pp. 458-460.
Sun, Hong ; Itoh, Yutaka ; Hanafusa, Kenji ; Kamei, Kazuhito ; Tomida, Toshiro. / TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films. In: Journal of Electron Microscopy. 1996 ; Vol. 45, No. 5. pp. 458-460.
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