TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films

Hong Sun, Yutaka Itoh, Kenji Hanafusa, Kazuhito Kamei, Toshiro Tomida

Research output: Contribution to journalArticle

Abstract

The planar-view and cross-sectional microstructures of binary Sm-Fe magnetic thin films deposited on quartz glass substrates by the RF-sputtering method are investigated using a transmission electron microscope (TEM). The cross-sectional micrographs and TEM diffraction patterns show decent columnar structures in the films and special crystallographic orientations. The magnetic properties of Sm-Fe thin films can also be well explained by their microstructural characteristics.

Original languageEnglish
Pages (from-to)458-460
Number of pages3
JournalJournal of Electron Microscopy
Volume45
Issue number5
Publication statusPublished - 1996
Externally publishedYes

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Keywords

  • Magnetic
  • Microstructure
  • Sm-Fe
  • TEM
  • Thin film

ASJC Scopus subject areas

  • Instrumentation

Cite this

Sun, H., Itoh, Y., Hanafusa, K., Kamei, K., & Tomida, T. (1996). TEM observation of microstructures in RF-sputtered Sm-Fe magnetic thin films. Journal of Electron Microscopy, 45(5), 458-460.