Temperature characteristics of pure shear mode FBARs consisting of (112̄0) textured ZnO films

Takahiko Yanagitani, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Thickness extensional mode FBAR consisting of (0001) textured ZnO films and pure thickness shear mode FBAR consisting of (112̄0) textured ZnO films were fabricated. Temperature coefficients of frequency (TCF) of these FBARs were measured in the temperature range of 10-60 °C. In both of the resonators, the parallel resonant frequencies varied linearly with temperature. The TCF were determined as -63.1 [ppm/°C] for thickness extensional mode resonator and -34.7 [ppm/°C] for pure-shear mode resonator.

Original languageEnglish
Title of host publication2006 IEEE International Ultrasonics Symposium, IUS
Pages1459-1462
Number of pages4
DOIs
Publication statusPublished - 2006 Dec 1

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume1
ISSN (Print)1051-0117

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Keywords

  • (11-20) textured ZnO film
  • Component
  • Pure shear mode FBAR
  • Temperature coefficient of frequency

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Yanagitani, T., Kiuchi, M., Matsukawa, M., & Watanabe, Y. (2006). Temperature characteristics of pure shear mode FBARs consisting of (112̄0) textured ZnO films. In 2006 IEEE International Ultrasonics Symposium, IUS (pp. 1459-1462). [4152223] (Proceedings - IEEE Ultrasonics Symposium; Vol. 1). https://doi.org/10.1109/ULTSYM.2006.367