A temperature sensor based on a temperature-sensitive quartz 'tuning fork' resonator was developed. The resonator was fabricated using photolitography and anisotropic etching. The optimum cut of the crystal and optimum resonator orientation on the wafer were determined, taking into account the anisotropic etching properties of the crystal, to give a large temperature coefficient of frequency consistent with small equivalent series resistance. The tuning fork temperature sensor operates over a wide temperature range (from 4. 2K to 250 degree C). After the temperature sensor was cycled between 0 degree C and 4. 2K, hysteresis in the temperature characteristic was only 0. 005K at 0 degree C. The quartz temperature sensor is quite compact; it is mounted in a hermetic case only 3 mm in diameter.
|Title of host publication||Proceedings of the Annual IEEE International Frequency Control Symposium|
|Number of pages||6|
|Publication status||Published - 1986|
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering