Texture modification of wurtzite piezoelectric films by ion beam irradiation

Takahiko Yanagitani, Masato Kiuchi

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Texture modification of wurtzite films in ion beam assisted deposition was investigated. Unusual (11. 2-0) texture formation appeared in the ZnO and AlN films prepared by grazing ion beam sputtering. Such a (11. 2-0) texture formation was also observed even in the ZnO film deposited under argon ion beam irradiation. Mechanism of the formation probably relates to physical interaction between energetic particle irradiation and wurtzite structure, for example, sputtering, collision etc. Pole figure analysis and SEM image revealed that crystal grains in the films have strong out-of plane and in-plane orientation (have biaxial texture) and in-plane c-axis direction corresponds to incident ion beam direction.

Original languageEnglish
Pages (from-to)816-819
Number of pages4
JournalSurface and Coatings Technology
Volume206
Issue number5
DOIs
Publication statusPublished - 2011 Nov 25
Externally publishedYes

Fingerprint

wurtzite
Ion beams
textures
Textures
ion beams
Irradiation
irradiation
Sputtering
sputtering
Ion beam assisted deposition
Argon
grazing
energetic particles
Poles
poles
argon
Crystals
Scanning electron microscopy
scanning electron microscopy
collisions

Keywords

  • Physical vapor deposition processes
  • Piezoelectric materials
  • X-ray diffraction

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Texture modification of wurtzite piezoelectric films by ion beam irradiation. / Yanagitani, Takahiko; Kiuchi, Masato.

In: Surface and Coatings Technology, Vol. 206, No. 5, 25.11.2011, p. 816-819.

Research output: Contribution to journalArticle

@article{3a8f64146eeb484ebde4583c17f492de,
title = "Texture modification of wurtzite piezoelectric films by ion beam irradiation",
abstract = "Texture modification of wurtzite films in ion beam assisted deposition was investigated. Unusual (11. 2-0) texture formation appeared in the ZnO and AlN films prepared by grazing ion beam sputtering. Such a (11. 2-0) texture formation was also observed even in the ZnO film deposited under argon ion beam irradiation. Mechanism of the formation probably relates to physical interaction between energetic particle irradiation and wurtzite structure, for example, sputtering, collision etc. Pole figure analysis and SEM image revealed that crystal grains in the films have strong out-of plane and in-plane orientation (have biaxial texture) and in-plane c-axis direction corresponds to incident ion beam direction.",
keywords = "Physical vapor deposition processes, Piezoelectric materials, X-ray diffraction",
author = "Takahiko Yanagitani and Masato Kiuchi",
year = "2011",
month = "11",
day = "25",
doi = "10.1016/j.surfcoat.2011.04.008",
language = "English",
volume = "206",
pages = "816--819",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "5",

}

TY - JOUR

T1 - Texture modification of wurtzite piezoelectric films by ion beam irradiation

AU - Yanagitani, Takahiko

AU - Kiuchi, Masato

PY - 2011/11/25

Y1 - 2011/11/25

N2 - Texture modification of wurtzite films in ion beam assisted deposition was investigated. Unusual (11. 2-0) texture formation appeared in the ZnO and AlN films prepared by grazing ion beam sputtering. Such a (11. 2-0) texture formation was also observed even in the ZnO film deposited under argon ion beam irradiation. Mechanism of the formation probably relates to physical interaction between energetic particle irradiation and wurtzite structure, for example, sputtering, collision etc. Pole figure analysis and SEM image revealed that crystal grains in the films have strong out-of plane and in-plane orientation (have biaxial texture) and in-plane c-axis direction corresponds to incident ion beam direction.

AB - Texture modification of wurtzite films in ion beam assisted deposition was investigated. Unusual (11. 2-0) texture formation appeared in the ZnO and AlN films prepared by grazing ion beam sputtering. Such a (11. 2-0) texture formation was also observed even in the ZnO film deposited under argon ion beam irradiation. Mechanism of the formation probably relates to physical interaction between energetic particle irradiation and wurtzite structure, for example, sputtering, collision etc. Pole figure analysis and SEM image revealed that crystal grains in the films have strong out-of plane and in-plane orientation (have biaxial texture) and in-plane c-axis direction corresponds to incident ion beam direction.

KW - Physical vapor deposition processes

KW - Piezoelectric materials

KW - X-ray diffraction

UR - http://www.scopus.com/inward/record.url?scp=80055112448&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80055112448&partnerID=8YFLogxK

U2 - 10.1016/j.surfcoat.2011.04.008

DO - 10.1016/j.surfcoat.2011.04.008

M3 - Article

AN - SCOPUS:80055112448

VL - 206

SP - 816

EP - 819

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 5

ER -