Texture of thin silicon films deposited from Si2Cl6

Y. Kato*, N. Saito, Akio Fuwa

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)

    Fingerprint

    Dive into the research topics of 'Texture of thin silicon films deposited from Si<sub>2</sub>Cl<sub>6</sub>'. Together they form a unique fingerprint.

    Physics & Astronomy

    Engineering & Materials Science

    Chemical Compounds