The design of MEMS scanner for the three dimensional actuation with a pair of beams

Yohei Oguchi, Chisa Iino, Eiji Iwase

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.

    Original languageEnglish
    Pages (from-to)448-453
    Number of pages6
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume136
    Issue number10
    DOIs
    Publication statusPublished - 2016

    Fingerprint

    MEMS
    Scanning
    Torsional stress
    Fabrication

    Keywords

    • 3-D actuation
    • Beam design
    • MEMS scanner
    • Resonant frequency

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering

    Cite this

    The design of MEMS scanner for the three dimensional actuation with a pair of beams. / Oguchi, Yohei; Iino, Chisa; Iwase, Eiji.

    In: IEEJ Transactions on Sensors and Micromachines, Vol. 136, No. 10, 2016, p. 448-453.

    Research output: Contribution to journalArticle

    @article{a3dc9846358e443d8953b35c9f073679,
    title = "The design of MEMS scanner for the three dimensional actuation with a pair of beams",
    abstract = "We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.",
    keywords = "3-D actuation, Beam design, MEMS scanner, Resonant frequency",
    author = "Yohei Oguchi and Chisa Iino and Eiji Iwase",
    year = "2016",
    doi = "10.1541/ieejsmas.136.448",
    language = "English",
    volume = "136",
    pages = "448--453",
    journal = "IEEJ Transactions on Sensors and Micromachines",
    issn = "1341-8939",
    publisher = "The Institute of Electrical Engineers of Japan",
    number = "10",

    }

    TY - JOUR

    T1 - The design of MEMS scanner for the three dimensional actuation with a pair of beams

    AU - Oguchi, Yohei

    AU - Iino, Chisa

    AU - Iwase, Eiji

    PY - 2016

    Y1 - 2016

    N2 - We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.

    AB - We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.

    KW - 3-D actuation

    KW - Beam design

    KW - MEMS scanner

    KW - Resonant frequency

    UR - http://www.scopus.com/inward/record.url?scp=84990857196&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84990857196&partnerID=8YFLogxK

    U2 - 10.1541/ieejsmas.136.448

    DO - 10.1541/ieejsmas.136.448

    M3 - Article

    VL - 136

    SP - 448

    EP - 453

    JO - IEEJ Transactions on Sensors and Micromachines

    JF - IEEJ Transactions on Sensors and Micromachines

    SN - 1341-8939

    IS - 10

    ER -