The design of MEMS scanner for the three dimensional actuation with a pair of beams

Yohei Oguchi, Chisa Iino, Eiji Iwase

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.

Original languageEnglish
Pages (from-to)448-453
Number of pages6
Journalieej transactions on sensors and micromachines
Volume136
Issue number10
DOIs
Publication statusPublished - 2016

Keywords

  • 3-D actuation
  • Beam design
  • MEMS scanner
  • Resonant frequency

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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