The design of MEMS scanner for the three dimensional actuation with a pair of beams

Yohei Oguchi, Chisa Iino, Eiji Iwase

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    We propose the design for three-dimensional (3-D) scanning micromirror with single pair of beams. A 3-D scanning micromirror is powerful solution for projection/detection of a 3-D image in tiny devices. We succeed in designing and fabricating the micromirror having three separated resonance modes (two torsion modes and one parallel mode) with high fill-factor. Our design of single pair of beams can contribute to simpleness and compactness of a 3-D scanner because of easy fabrication and high fill-factor.

    Original languageEnglish
    Pages (from-to)448-453
    Number of pages6
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume136
    Issue number10
    DOIs
    Publication statusPublished - 2016

    Keywords

    • 3-D actuation
    • Beam design
    • MEMS scanner
    • Resonant frequency

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering

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