The frequency switchable multi-layered BST/BaTiO3 epitaxial film resonator

Takahiro Shimidzu, Takahiko Yanagitani, Kiyotaka Wasa

    Research output: Chapter in Book/Report/Conference proceedingConference contribution


    Film bulk acoustic wave resonator (FBAR) filters are promising for the mobile communication devices. Frequency switchable filters are suitable for selecting the vacant frequency bands. Usual polarity unidirectional single layer resonator excites fundamental mode whereas polarity inverted double layer resonator excites second mode. In this study, we considered that polarity inverted structure is easily obtained by applying DC field, which is less than coercive field of BaTiO3, to two-layered BST/BaTiO3 epitaxial films. During the application of -36 V, the two-layered resonator excites fundamental mode. On the other hand, during the application of +36 V, the resonator excites second mode. These results show frequency band switching by DC field.

    Original languageEnglish
    Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
    PublisherIEEE Computer Society
    ISBN (Electronic)9781538633830
    Publication statusPublished - 2017 Oct 31
    Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
    Duration: 2017 Sep 62017 Sep 9


    Other2017 IEEE International Ultrasonics Symposium, IUS 2017
    CountryUnited States

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

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