The immobilization of DNA on microstructured patterns fabricated by maskless lithography

Guo Jun Zhang, Takashi Tanii, Tamotsu Zako, Takashi Funatsu, Iwao Ohdomari

    Research output: Contribution to journalArticle

    27 Citations (Scopus)

    Abstract

    The site-directed covalent immobilization of amino-terminated DNA oligonucleotides on microstructured patterns at silicon surfaces generated by the methodology of electron beam (EB) lithography was investigated. The microstructured patterns characterized by scanning electron microscopy (SEM) revealed remarkably regular in size and shape. After treatment with different time of activation (10s and 30min), self-assembled layers of 3-aminopropyltriethoxysilane (APTES) on silicon surfaces characterized by X-ray photoelectron spectroscopy (XPS) were demonstrated to obtain similar N 1s peaks. The immobilization specificity was evaluated by means of 5′ amino-modified oligonucleotides labeled with Cy 5 at its 3′ end attached onto microstructured patterns. The high-density DNA array (40,000 spots per cm2) was achieved, and the resulting array exhibited the specific binding due to DNA-DNA interaction. Additional studies indicated hardly visible signals when non-complementary probes were immobilized on the microstructured patterns. The deposition of DNA in a microstructure array using this technique is precise and homogeneous, showing the potential for high-density information storage and the miniaturization for biosensors and biochips.

    Original languageEnglish
    Pages (from-to)243-248
    Number of pages6
    JournalSensors and Actuators, B: Chemical
    Volume97
    Issue number2-3
    DOIs
    Publication statusPublished - 2004 Feb 1

    Fingerprint

    immobilization
    Lithography
    DNA
    lithography
    deoxyribonucleic acid
    oligonucleotides
    Oligonucleotides
    Silicon
    Biochips
    Electron beam lithography
    miniaturization
    silicon
    bioinstrumentation
    Biosensors
    X ray photoelectron spectroscopy
    Chemical activation
    photoelectron spectroscopy
    activation
    electron beams
    methodology

    Keywords

    • DNA
    • Electron beam lithography
    • Fabrication
    • Fluorescence detection
    • Immobilization
    • Microstructure patterns

    ASJC Scopus subject areas

    • Analytical Chemistry
    • Electrochemistry
    • Electrical and Electronic Engineering

    Cite this

    The immobilization of DNA on microstructured patterns fabricated by maskless lithography. / Zhang, Guo Jun; Tanii, Takashi; Zako, Tamotsu; Funatsu, Takashi; Ohdomari, Iwao.

    In: Sensors and Actuators, B: Chemical, Vol. 97, No. 2-3, 01.02.2004, p. 243-248.

    Research output: Contribution to journalArticle

    Zhang, Guo Jun ; Tanii, Takashi ; Zako, Tamotsu ; Funatsu, Takashi ; Ohdomari, Iwao. / The immobilization of DNA on microstructured patterns fabricated by maskless lithography. In: Sensors and Actuators, B: Chemical. 2004 ; Vol. 97, No. 2-3. pp. 243-248.
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